Process for creating metal-insulator-metal devices

ABSTRACT

A process is described for fabricating an active addressing component such as a metal-insulator-metal (MIM) device by creating surface relief levels to form trenches, and depositing a metal in the trenches. The metal is anodized to create a non-linear dielectric. A second metal is deposited in the trenches to create an electrical with the dielectric which a contact is provided, and transferring the MIM device to a substrate by adhesive transfer.

BACKGROUND

Active matrix liquid crystal displays (AMLCD) are formed from anaddressing matrix (i.e., an active matrix) and an electro-opticallyresponsive layer that includes multiple liquid crystal cells (i.e., aliquid crystal layer). The addressing matrix includes active deviceswhich are addressed by external addressing lines connected to driverelectronics. An active device is associated with one or more localelectrodes providing an electrical field to act upon the liquid crystal(LC) layer. Typically a particular active device is associated with apicture element or pixel in the AMLCD. The active matrix separates theaddressing of the pixels from an electro-optical response of the LClayer. An electrical field on a pixel set by an active device andsuitable switching waveforms provide a desired optical output such as agrayscale shade, etc.

Two types of active devices may be used in AMLCD. One is athree-terminal device such as a Thin Film Transistor (TFT) device, andanother is two-terminal device such as a Metal-Insulator-Metal (MIM)device. Each type has their advantages and disadvantages. In general,TFT devices make use of rigid substrates (i.e., glass substrates) andsilicon processing to form the active devices. Typically siliconprocesses are best effected at relatively high temperatures (i.e.,greater than 300° C.). Furthermore, since the complete addressing activematrix is formed on one substrate, and the device itself is complex,several aligned lithographic processes may be needed (e.g., more thanfour processes). This requires the use of a dimensionally stable, hightemperature substrate such as glass, rather than a low temperaturedimensionally unstable polymer based substrate.

MIM devices rely on non-linear behavior of certain dielectrics (e.g.oxides such as tantalum oxide or Ta₂O₅), which may be formed at lowtemperatures (i.e., less than 200° C.). An addressing matrix is formedon both front plane and back plane of a display. Therefore, in generalMIM devices are simpler to manufacture than a TFT device, since thereare fewer process (i.e., less than four aligned lithographic processes).

It may be advantageous for large area applications to form a displayfrom plastic substrates, rather than thin glass substrates that aretypically used. The use of plastic substrates may limit upper processtemperatures and limit the number of aligned lithographic processes dueto the dimensional instability of a plastic substrate. Therefore, whenusing plastic substrates, MIM devices may be preferred over TFT devices.

A MIM device may functionally behave like a capacitor having anon-linear current/voltage (I/V) characteristic. In other words, currentdoes not flow up until a threshold voltage is exceeded, after which theMIM device presents relatively low impedance. The threshold voltage isobserved in both applied polarities, and often the MIM device is modeledas a capacitor in parallel with a pair of diodes in a “back to back”arrangement.

A single MIM device in series with the addressed liquid crystal pixelhas an effect on a charge blocking device, such that once a pixelvoltage corresponding to a desired optical output has been achieved,further charge is not passed to or from the pixel and that optical stateis held until the pixel is next addressed.

Due to the non-symmetric nature of the interfaces between the insulatorand the metal contacts, the forward and reverse threshold voltages maybe different. In the single MIM case, this may lead to liquid crystalcell polarization and an effect known as “image sticking”. To overcomethe “image sticking” effect, it is well known in the art to use two MIMdevices in “anti-series” fashion. The two MIM devices are typicallyreferred to as a “dual-MIM” device. The dual-MIM device arrangementprovides an ability to cancel out forward bias effects of one MIM devicewith reverse bias effects of the other MIM device, and also reduces thecapacitive coupling of the aggregate dual-MIM device. One disadvantageis that the maximum current is reduced and the overall threshold may beincreased. Furthermore, the additional complexity of the matrix mayaffect the overall manufacturing yield.

Traditionally MIM devices are formed by deposition, photo-lithography,material conversion and etching in a largely subtractive manner on thesurface of the final display substrate. The processes applied are thuslimited by the substrate material and the deleterious effect of theprotrusion and non-planarity of the resulting structure into the displaycell on the liquid crystal electro-optical effect.

Accordingly, the need exists for new and improved systems and methods tofabricate MIM devices or active addressing elements for use in AMLCD.

SUMMARY

A process is described for fabricating an active addressing componentsuch as a metal-insulator-metal (MIM) device by creating surface relieflevels to form trenches, and depositing a metal in the trenches. Themetal is anodized to create a non-linear dielectric. A second metal isdeposited in the trenches to create an electrical with the dielectricwhich a contact is provided, and transferring the MIM device to asubstrate by adhesive transfer.

BRIEF DESCRIPTION OF THE DRAWINGS

The following detailed description refers to the accompanying figures.In the figures, the left-most digit(s) of a reference number identifiesthe figure (Fig.) in which the reference number first appears. Moreover,the same reference numbers are used throughout the drawings to referencelike features and components. FIGS. 2-15 illustrate exemplary processesin the fabrication of a MIM device or an active addressing element thatcause an electro-optic effect (e.g., effect an LCC) using sputteredmetallization and ultraviolet embossing. FIGS. 16-28 illustrateexemplary processes in the fabrication a MIM device or an activeaddressing element that cause an electro-optic effect (e.g., effect anLCC) using electro-deposited metallization, anodizing, and ultravioletembossing.

FIG. 1 is a schematic diagram illustrating an exemplary AMLCD of LCCsactivated by MIM devices fabricated without the use of photolithography.

FIG. 2 is a cross section diagram illustrating initial layers beingapplied in the fabrication of a MIM device.

FIG. 3 is a cross section diagram illustrating embossing in thefabrication of a MIM device.

FIG. 4 is a cross section diagram illustrating removal of an embossingshim in the fabrication of a MIM device.

FIG. 5 is a cross section diagram illustrating exposing a conductivecarrier in the fabrication of a MIM device.

FIG. 6 is a cross section diagram illustrating deposition of a metal inthe fabrication of a MIM device.

FIG. 7 is a cross section diagram illustrating selective anodization inthe fabrication of MIM device.

FIG. 8 is a cross section diagram illustrating removal of excess metalin the fabrication of MIM device.

FIG. 9 is a cross section diagram illustrating reduction of a surfacelayer in the fabrication of MIM device.

FIG. 10 is a cross section diagram illustrating a secondary anodizationin the fabrication of MIM device.

FIG. 11 is a cross section diagram illustrating a secondary depositionof a metal in the fabrication of MIM device.

FIG. 12 is a cross section diagram illustrating lamination of a finalsubstrate in the fabrication of MIM device.

FIG. 13 is a plan view diagram illustrating a MIM device.

FIG. 14 is a cross section diagram illustrating a display configurationwith a MIM device.

FIG. 15 is a schematic diagram illustrating an equivalent circuitdiagram of the MIM device of FIG. 13.

FIG. 16 is a cross section diagram illustrating initial layers beingapplied in the in the fabrication of MIM device.

FIG. 17 is a cross section diagram illustrating embossing in thefabrication of a MIM device.

FIG. 18 is a cross section diagram illustrating removal of an embossingshim in the fabrication of a MIM device.

FIG. 19 is a cross section diagram illustrating exposing a conductivecarrier in the fabrication of a MIM device.

FIG. 20 is a cross section diagram illustrating electro-deposition of ametal in the fabrication of a MIM device.

FIG. 21 is a cross section diagram illustrating selective anodization inthe fabrication of MIM device.

FIG. 22 is a cross section diagram illustrating a secondaryelectro-deposition of a metal in the fabrication of MIM device.

FIG. 23 is a cross section diagram illustrating reduction of a surfacelayer in the fabrication of MIM device.

FIG. 24 is a cross section diagram illustrating a tertiaryelectro-deposition of a metal in the fabrication of MIM device.

FIG. 25 is a cross section diagram illustrating lamination of a finalsubstrate in the fabrication of MIM device.

FIG. 26 is a plan view diagram illustrating a MIM device.

FIG. 27 is a cross section diagram illustrating a display configurationwith a MIM device.

FIG. 28 is a schematic illustrating an equivalent circuit diagram of theMIM device of FIGS. 26 and 27.

DETAILED DESCRIPTION

Overview

The following discussion is directed to systems and methods forfabricating metal-insulator-metal (MIM) devices for use in active matrixelectro-optic displays in particular, but not limited to MIM devicesthat control liquid crystal cells (LCC) of field-drive displays such asactive matrix liquid crystal displays (AMLCD). The MIM devices may be ofeither single or dual MIM. Fabrication of the MIM devices is performedby material deposition, anodizing of material, and etching awaymaterial. Photolithographic processes to fabricate the MIM devices areavoided.

Exemplary AMLCD

FIG. 1 shows an exemplary AMLCD 100. AMLCD 100 includes multiple liquidcrystal cells (LCC) that are activated by dedicated MIM devices arrangedin a matrix. In this example, LCCs 105-1, 105-2, 105-3, and 105-4 areshown. The activation of LCC 105-1 is controlled by MIM device 110-1;the activation of LCC 105-2 is controlled by MIM device 110-2; theactivation of LCC 105-3 is controlled by MIM device 110-3; and theactivation of LCC 105-4 is controlled by MIM device 110-4. MIM devices110-1, 110-1, 110-3, and 110-4 are fabricated using the processesdescribed below.

Although, MIM devices 110-1 to 110-4 are shown as single MIM devices,dual MIM devices illustrated as two capacitive components in antiseriesmay be used. The choice of a single MIM and a dual MIM device depends onthe performance sought by a user.

Video signals 115 and 116 are received by LCCs 105-1 to 105-4. The videosignals 115 and 116 may be received in the form of voltage signals. Anaddressing voltage 120 may be received by MIM devices 110-1 and 110-2.The addressing voltage 120 may be in the form of a square waverepresenting a “select” or “non-select” condition. When a selectcondition is received, the line that connects MIM devices 110-1 and110-2 is considered an addressed line, the MIM devices are biased intoconduction and LCCs 105-1 and 105-2 are charged according to the levelson the lines as represented by video signals 115 and 116 giving thedesired optical output. At the same time, the addressing voltage 125 isset to “non-select” such that the video signals do not affect the statesof LCC 105-3 and 105-4. After that, voltage 120 is set to “non-select”and voltage 125 is set to “select”, and the LCCs 105-1 and 105-2 holdtheir states and LCCs 105-3 and 105-4 receive the video signalscorresponding to that line, and so on until the whole matrix isaddressed. By controlling the biasing of MIM devices 110-1 to 110-4through various addressing voltages and providing direct video signals115 and 116, LCCs 105-1 to 105-4 are controlled and an image ispresented on AMLCD 100.

Fabrication—Sputtered Metallization And Ultraviolet Embossing

FIGS. 2 to 15 describe the processes in fabrication of dual MIM devicesthat may be used as MIM device 110-1 to 110-4 of FIG. 1, where sputterdeposition of metal along with UV (ultraviolet) embossing is used.Although dual MIM devices are described, single MIM devices may also befabricated by modifying the described embossing and metal depositionprocesses.

FIG. 2 shows initial layers (components) being applied. A conductivecarrier 205 may be a bulk conductive (e.g. metal plate or sheet), or maybe dielectric sheet with a conducting surface layer 210. Copper ornickel with a highly smooth surface finish and high conductivity may beused as conductive carrier 205.

The surface of the metal (i.e., surface conductive layer 210) is treatedto form a thin release surface 215. For example, the surface conductivelayer 210 may be treated with a 0.1N potassium dichromate aqueoussolution for 10 minutes followed by rinsing and drying. The surfaceconductive layer 210 may also be treated with a surfactant or amonolayer polymer release agent. The thin release surface 215 that isformed is substantially conductive.

An optically transparent UV curable dielectric resin (e.g. NorlandOptical Products NOA83H) is coated to form an embossable (i.e.,deformable) layer 220. An embossing shim 225 is further provided with asurface relief suitable for the formation of all the features of theaddressing lines and MIM devices. The shim 225 is transparent to UVwavelengths.

FIG. 3 shows an embossing process. The embossing shim 225 is broughtinto contact with the embossable resin 220 such that the resin takes upthe form of the shim 225, and UV illumination 310 is applied to cure andsolidify the embossable resin 220 while the shim 225 is in place.

FIG. 4 shows the configuration after embossing. The embossing shim 225is removed from the embossable resin 220 to leave a cured surface relieflayer 405 that includes trenches 410 and 415 at various heights orfeature levels.

FIG. 5 shows exposing the release surface 215 and by way of conductionthe conductive layer 210. A portion of the cured surface relief material405 is removed. Examples of processes to remove the cured surface reliefmaterial 405 include oxygen plasma etch, UV-ozone treatment, and laserablation. This results in the exposure of the conductive carrier 210 andrelease surface 215 under the area defined by the trench 410. Should theaction of this process also remove or render ineffective the releasesurface 215, release surface 215 may be re-passivated (i.e., re-applied)at this stage.

FIG. 6 shows the deposition of a metal. The deposited metal 600 ispreferably tantalum (Ta); however, other metals or alloys whose oxideshave similar electrical properties to Ta₂O₅ may be used, andparticularly alloys based on Ta, may be used. An exemplary list ofmetals that may be anodized includes: Al, Bi, Sb, Nb, Ta, Ag, Cd, Fe,Mg, Sn, W, Zn, Zr, Ti, Cu, and Cr. Also, silicon may beanodized-oxidized. The metal 600 may be deposited using any standardsputtering or evaporation technique under vacuum (i.e., generally avacuum deposition technique) over the whole of the surface reliefstructure 405. In particular the metal 600 is deposited over thesurfaces 405 and 215, and into the trenches defined by feature levels410 and 415. The height of the step between 415 and 410 can be adjustedor optimized to minimize deposition on the sidewalls. The depositionmethod is arranged to be largely anisotropic so that there is little orno material deposited on the sidewalls of the structure. However, anymetal that adheres to the sidewalls can be removed by an isotropic wetetch step using a standard metal etchant.

FIG. 7 shows selective anodization. In particular, FIG. 7 shows theselective anodization of the metal (Ta) 600 connected to the releasesurface 215 and forming Ta₂O₅ 700. The anodization is performed in agalvanic cell formed by using the conductive layer 210 as an anode, acathode 705 of a suitable metal (e.g. platinum) and a suitableelectrolyte 710. The electrolyte 710 is preferably a boric acid solutionwith an approximate pH of 7. Alternatively, a citric acid solution maybe used, and surfactants and buffer materials may also be present.Because the only area electrically connected to the anode conductivelayer 210 and in contact with the electrolyte 710 is the metal 600 atthe bottom of the trench feature 410, only the surface of this metal 600is converted to the Ta₂O₅ 700. The anodization coefficient for Ta is˜1.9 nm/volt, and a starting current density of ˜0.2 mA/cm² is used. Thefinal anodization is performed using a potentiostatic technique where anapplied voltage V 715 is constant. The voltage V 715 will determine thethickness of the Ta₂O₅ layer and the eventual device threshold.

FIG. 8 shows removal of excess metal (i.e., Ta). An etching technique,such as dry plasma etching or wet chemical etch is used with a highselectivity between the Ta 600 and Ta₂O₅ 700, such that the thicknessand properties of the material formation of the Ta₂O₅ film 700 isunaffected by this process.

FIG. 9 shows reducing the surface layer 405 thickness. The whole of thesurface relief layer 405 is reduced by enough material to uncover therelease surface 215 located under the second level surface features(i.e., as defined by feature 415). The etching is accomplished by knowntechniques such as dry plasma etching, UV-ozone etching, or direct laserablation. Should the surface release layer 215 be removed or renderedineffective by this process, release surface 215 may be re-passivated(i.e., re-applied) at this stage.

FIG. 10 shows a secondary anodization. A similar process as described inFIG. 7 is performed in anodizing the sidewalls of the metal 600 to formTa₂O₅ 1000. In particular a galvanic cell formed by using the conductivesurface 215 as an anode, a cathode 1005 of a suitable metal (e.g.,platinum) and a suitable electrolyte 1010. An applied voltage V 1015determines the thickness of the Ta₂O₅ 1000 layer.

Together with the Ta₂O₅ layer 700, the Ta₂O₅ 1000 forms a complete layerof Ta₂O₅ over the metal 600. Further heating, by thermal chamber orlocalized laser absorption, is performed to anneal the Ta₂O₅ 700 and1000 to give the desired electrical characteristics.

FIG. 11 shows a secondary metal deposition. A metal 1100 is deposited.Preferably an electro-deposition (e.g., electroplating) technique isused. A deposition potential is chosen to ensure that the Ta₂O₅ layer1000 is not biased into conduction, such that the metal 1100 isdeposited only into the channels as shown in FIG. 9 formed by thesecondary level surface relief (i.e., as defined by trench 415). Thesechannels form the addressing lines (i.e., addressing lines 120 ofFIG. 1) and contact to the LCC pixel electrode as further describedbelow. The addressing lines may also be referred to as a bus bar or buslines. The metal 1100 is chosen to provide electrical conductivity, asuitable interface to the Ta₂O₅ layers 700 and 1000, and to permitelectro-deposition. Examples of metal 1100 include nickel, aluminum,copper and silver. Thin deposits of metal that are inadvertently formedover the Ta₂O₅ 1000 may be removed by a short etch using dry plasma orwet etchant techniques.

FIG. 12 shows lamination of the final substrate. An adhesive layer 1200is coated onto the circuit as defined by surface layer 405, metal 1100,and the Ta₂O₅ layers 700 and 1000. The thickness of the adhesive layer1200 is preferably between 5 and 20 microns. Suitable adhesive materialsinclude “NOA81” from Norland Optical Products. A display substrate 1205is applied to adhesive layer 1200. Display substrate 1205 may be glass,flexible plastic or other material. Display substrate 1205 may bebetween 50 and 2000 microns.

After the adhesive layer 1200 has attained a suitable adhesion to thedisplay substrate 1205 and the circuit as defined by surface layer 405,metal 1100, and the Ta 600, the Ta₂O₅ layers 700 and 1000, the carriersubstrate 205, with conductive layer 210 and release surface 215 may beremoved by mechanical peeling (i.e., separation). The adhesion and peelstrengths of the various interfaces are such that the separation occurspreferentially at the release surface 215. The Ta 600, Ta₂O₅ 1000, andsecondary metal 1100 are exposed. Further anodizing of the Ta 600 may beperformed to prevent addressing short circuits between the addressingline metal and the LCC contact metal as shown below. The carriersubstrate 205 may be discarded, or preferentially cleaned and reused tominimize material wastage.

FIG. 13 shows a plan view of the completed device, showing theaddressing line 1320 (i.e., metal 1100) corresponding to the schematicaddressing lines 120 of FIG. 1, and the LCC electrode connection 1330(i.e., metal 1100). The Ta₂O₅ regions 1300 and 1305 represent thesub-regions of the Ta₂O₅ layer 1000 in contact with metal regions 1320(i.e., metal 1100) and 1330 (i.e., metal 1100) respectively.

FIG. 14 shows a final display construction. To provide an electrode toactivate the liquid crystal cell (LCC), and to define the pixel area, atransparent conductive material is used to connect one side of the dualMIM structure to the LCC. The transparent conductive material is coatedand patterned to form LCC electrode 1410, and may be of any knownmaterial with suitable properties. Preferably a dopedpolyethylenedioxythiophene dispersion is used, and is known as PEDOT orPDOT available as Baytron “P” from Bayer Chemicals. The PEDOT electrode1410 may be patterned using lithographic techniques such as laserablation.

To effect the correct alignment of the liquid crystal and LCC geometryany of many known alignment layers, barrier layers and other treatmentsmay be applied to this substrate, represented collectively as alignmentlayer 1430. A second display substrate 1440 is also prepared. Displaysubstrate 1440 contains simple transparent electrode patterning and maybe fabricated by any known technique. Preferably a similar addressingline (i.e., bus bar) definition, metalization, transfer and transparentconductive material coating and patterning technique is used as outlinedabove, without the deposition and conversion of Ta or similar metals, toform a second LCC connection transparent conductor 1445. The seconddisplay substrate 1440 also affords an alignment layer compatible withthe desired liquid crystal electro-optical mode, shown as alignmentlayer 1450. To complete the display a liquid crystal material 1460 isintroduced into the cell. Other structures and materials relating to theconstruction and preparation of a complete display system are not shown,but are well known in the art.

FIG. 15 shows an equivalent circuit 1500 of the dual MIM device shown inFIG. 13. Circuit 1500 includes a connector 1505 which represents bus-baror addressing line 1320 (i.e., metal 1100) of FIG. 13. Bus-bar 1505receives an addressing voltage such as addressing voltage 120 as shownin FIG. 1. Connector 1505 is coupled to a first MIM element depicted bythe capacitive component 1510, the dielectric of which represents Ta₂O₅layer 1305. A second MIM element is depicted by the capacitive component1515, the dielectric of which represents Ta₂O₅ layer 1300. Capacitivecomponents 1510 and 1515 are particularly coupled to be in an“anti-series” arrangement such that the plates of the same asymmetricpolarity, if any, are coupled to one another. In this example the platesindicated by a negative bias asymmetric polarity are connected together.Capacitive components 1510 and 1515 are connected together by aconnector 1520 which represents the Ta 600 of FIG. 13. Capacitivecomponent 1515 is coupled to a connector 1525 which represents theelectrode contact 1330. Connector 1525 is coupled to a further connector1530 which represents the transparent electrode 1410. Connector 1530 iscoupled to an LCC 1535 such as LCC formed by layers 1430, 1450 and 1460in FIG. 14. LCC 1535 is coupled to a final connector 1540 whichrepresents the transparent electrode 1445 which receives a video signalsuch as video signal 115 of FIG. 1.

Fabrication—Electro-deposited Metallization

FIGS. 16 to 28 describe the processes in fabrication dual MIM devicesthat may be used as MIM device 110-1 to 110-4 of FIG. 1, where onlyelectro-deposition of metals is used, which reduces material waste andallows atmospheric pressure processing. Although dual MIM devices aredescribed, single MIM devices may also be fabricated by modifying thedescribed embossing and metal deposition processes.

FIG. 16 shows initial layers (components) being applied. A conductivecarrier 1605 may be a bulk conductive (e.g. metal plate or sheet), ormay be dielectric sheet with a conducting surface layer 1610. Copper ornickel with a highly smooth surface finish and high conductivity may beused as conductive carrier 1605.

The surface of the metal (i.e., surface conductive layer 1610) istreated to form an oxide release surface 1615. For example, the surfaceconductive layer 1610 may be treated with a 0.1N potassium dichromateaqueous solution for 10 minutes followed by rinsing and drying. Thesurface conductive layer 1610 may also be treated with a surfactant orknown monolayer polymer release agent. A thin release layer 1615 isformed that is substantially conductive.

An optically transparent UV curable dielectric resin (e.g., NorlandOptical Products NOA83H) is coated to form an embossable (i.e.,deformable) layer 1620. An embossing shim 1625 is further provided witha surface relief suitable for the formation of all the features of theaddressing lines and MIM devices, characterized by the presence of morethan two height levels. The shim 1625 is transparent to UV wavelengths.

FIG. 17 shows an embossing process. The embossing shim 1625 is broughtinto contact with the embossable resin 1620 such that the resin 1620takes up the form of the shim 1625, and UV illumination 1710 is appliedto cure and solidify the embossable resin 1620 while the shim 1625 is inplace.

FIG. 18 shows the configuration after embossing. The embossing shim 1625is removed from the embossable resin 1620 to leave a cured surfacerelief layer 1800 having trenches 1805, 1810, and 1815 at variousheights or feature levels.

FIG. 19 shows exposing release surface 1615 and by way of conduction theconductive layer 1610. A portion of the cured surface relief material1800 is removed. Examples of processes to remove the cured surfacerelief material 1800 include direct laser ablation or UV-ozone treatmentcarried out at atmospheric pressure, so as to expose the conductivecarrier 1610 and release surface 1615 under the area defined by thetrench feature 1805. Secondary feature level 1810 and tertiary featurelevel 1815 are not completely removed at this stage. Should the actionof this removal process also remove or render ineffective the releasesurface 1615, release surface 1615 may be re-passivated (i.e.,re-applied) at this stage.

FIG. 20 shows electro-deposition of a metal. The metal deposited inregions 2000 and 2010 is preferably tantalum (Ta); however, other metalsor alloys which have oxides with similar electrical properties to Ta₂O₅,and particularly alloys based on Ta, may be used. An exemplary list ofmetals includes: Al, Bi, Sb, Nb, Ta, Ag, Cd, Fe, Mg, Sn, W, Zn, Zr, Ti,Cu, and Cr. The metal 2000 and 2010 is electro-deposited by forming agalvanic cell comprising of the conductive layer 1610 as cathode, aninert anode 2020 such as platinum, and a suitable electrolyte 2030. Avoltage 2040 is applied at conductive carrier surface 1610 and anode2020. A low temperature molten salt electrolyte 2030 is preferred, wherethe electrolyte 2030 may be e.g. a mixture of TaCl₅ and1-methyl-3-ethlyimidazolium chloride. The deposition of metal (i.e., Ta)2000, 2010 is confined to the areas defined initially by features 1805,and the thickness of the deposit is limited to form a layer similar butno higher than the secondary embossing features 1810, forming adielectric wall between the two areas of deposited metal 2000 and 2010.Alternatively, a combination of metals or alloys may beelectro-deposited, with a thicker layer of an easily processed metal,such as nickel or copper, followed by a thin layer of tantalum in orderto increase the conductivity and height of the features, withoutcompromising the surface material characteristics.

FIG. 21 shows selective anodization. The selective anodization isperformed on Ta 2000 and 2010 to form Ta₂O₅ 2100 and 2110. Anodizationis performed in a galvanic cell formed by using the conductive layer1610 as an anode, a cathode 2120 of a suitable metal (e.g., platinum)and a suitable electrolyte 2130. The electrolyte 2130 is preferably aboric acid solution with an approximate pH of 7. Alternatively, a citricacid solution may be used, and surfactants and buffer materials may alsobe present. The anodization coefficient for Ta is ˜1.9 nm/volt, and astarting current density of ˜0.2 mA/cm² is used. The final anodizationis performed using a potentiostatic technique where an applied voltage V2140 is held constant. Applied voltage 2140 determines the thickness ofthe Ta₂O₅ layer and the eventual device threshold.

FIG. 22 shows a secondary metal deposition. A contact metal 2200 isdeposited by electro-deposition. Collectively the following are treatedas a cathode: the conductive layer 1610, the previously deposited metalor Ta 2000 and 2010, and Ta₂O₅ 2100 and 2110. Further provided is ananode 2220 of suitable metal (e.g., platinum or nickel) and anelectrolyte 2230. By the control of additives in the electrolyte 2230,and adjusting an applied voltage 2240 the isotropy of the deposition canbe controlled to form a layer bridging between the areas of Ta₂O₅ 2100and 2110. The electro-deposition of metal 2200 over the dielectric Ta₂O₅is achieved by raising the potential beyond the threshold voltage of thedielectric layer. Metal 2200 provides a contact region between the twoMIM elements and forms a dual MIM structure.

FIG. 23 shows a reduction of the surface layer 1800. A portion of thecured surface relief material 1800 is removed by known techniques ofremoving polymer materials, for example by direct laser ablation orUV-ozone treatment carried out at atmospheric pressure. Conductivecarrier layer 1610 and release surface 1615 are exposed at the tertiarylevel trench 1815. Should the release surface 1615 be removed orrendered ineffective by this removal process, the release surface 1615may be re-passivated (i.e., re-applied) at this stage.

FIG. 24 shows a tertiary metal electro-deposition. A furtherelectro-deposition forms a metal conductor 2400. Metal 2400 is used asthe addressing structures or lines 120 shown in FIG. 1. Collectively theconductive layer 1610 and the side thickness region of the previouslydeposited metal or Ta 2000 form the cathode. Further an anode 2420 andelectrolyte 2430 are provided. A reduced potential voltage 2440 is usedto ensure that the deposition of metal 2400 only takes place in theregion defined originally by the trench feature 1815. Due to thepresence of dielectric 2100 and 2110, no further deposition occurs onthe secondary contact metal 2200. The thickness of the depositedconductors 2400 is such that the level of metal 2400 is below the heightof the primary metal deposition 2000 and 2010 and dielectric layers 2100and 110. An ohmic contact is provided between the tertiary metal 2400 tothe primary metal 2000.

FIG. 25 shows a lamination of the final substrate. An adhesive layer2500 is coated onto the circuit as defined by surface layer 1800, metal2400, and metal 2200. The thickness of the adhesive layer 2500 ispreferably between 5 and 20 microns. Suitable adhesive materials include“NOA81” from Norland Optical Products. A display substrate 2505 isapplied to adhesive layer 2500. Display substrate 2505 may be glass,flexible plastic or other material. Display substrate 2505 may bebetween 50 and 2000 microns.

After the adhesive layer 2500 has attained a suitable adhesion to thedisplay substrate 2505 and a circuit 2510, the conductive carrier 1605,with conductive layer 1610 and release surface 1615 may be removed bymechanical peeling (i.e., separation). Circuit 2510 includes and isdefined by 1800, 1810, 2000, 2010, and 2200. The adhesion and peelstrengths of the various interfaces are so engineered such that theseparation occurs at the release surface 1615. The Ta 2000 and 2010, andtertiary metal 2400 are exposed.

FIG. 26 shows a plan view of the completed device, showing addressingline 2620 (i.e., metal 2400) corresponding to schematic addressing lines120 of FIG. 1, and LCC electrode connection 2630 (i.e., metal 2010).

FIG. 27 shows a final display construction. To provide an electrode toactivate a liquid crystal cell (LCC), and to define the pixel area, atransparent conductive material is used to connect one side of the dualMIM structure to the LCC. The transparent conductive material is coatedand patterned to form an LCC electrode 2710, and may be formed of anyknown material with suitable properties. Preferably a dopedpolyethylenedioxythiophene dispersion is used, and is known as PEDOT orPDOT available as Baytron “P” from Bayer Chemicals. The PEDOT electrode2710 may be patterned using known lithographic techniques such as laserablation.

To effect the correct alignment of the liquid crystal and LCC geometryany of many known alignment layers, barrier layers and other treatmentsmay now be applied to this substrate, these represented collectively asalignment layer 2730. A second display substrate 2740 is also prepared.Display substrate 2740 contains simple transparent electrode patterningand may be fabricated by any known technique. Preferably a similaraddressing line or bus bar definition, metalization, transfer andtransparent conductive material coating and patterning technique is usedas outlined above, without the deposition and conversion of Ta orsimilar metals, to form the second LCC connection 2745. The seconddisplay substrate 2740 also affords an alignment layer compatible withthe desired liquid crystal electro-optical mode, shown as alignmentlayer 2750. To complete the display a liquid crystal material 2760 isintroduced into the cell. Other structures and materials relating to theconstruction and preparation of a complete display system are not shown,but are well known in the art.

FIG. 28 shows an equivalent circuit 2800 of the dual MIM device shown inFIGS. 26 and 27. Circuit 2800 includes a connector 2805 which representsbus-bar or addressing line 2620 of FIG. 26. Bus-bar 2805 receives anaddressing voltage such as addressing voltage on the address lines 120of FIG. 1. Connector 2805 is coupled to a first MIM element depicted bythe capacitive component 2810, the dielectric of which represents Ta₂O₅layer 2100. A second MIM element is depicted by the capacitive component2815, the dielectric of which represents Ta₂O₅ layer 2110. Capacitivecomponents 2810 and 2815 are particularly coupled to be in an“anti-series” arrangement such that the plates of the same asymmetricpolarity are coupled to one another. In this example the platesindicated by a negative bias asymmetric polarity are connected together.Capacitive components 2810 and 2815 are connected together by aconnector 2820 which represents the secondary metal contact 2200 of FIG.22. Capacitive component 2815 is coupled to a connector 2825 whichrepresents the electrode contact 2010. Connector 2825 is coupled to afurther connector 2830 which represents the transparent electrode 2710.Connector 2830 is coupled to an LCC 2835 such as LCC formed by layers2730, 2750 and 2760 in FIG. 27. LCC 2835 is coupled to a final connector2840 which represents the transparent electrode 2745 which receives avideo signal such as video signal 115 of FIG. 1.

Although the invention has been described in language specific tostructural features and/or methodological acts, it is to be understoodthat the invention defined in the appended claims is not necessarilylimited to the specific features or acts described. Rather, the specificfeatures and acts are disclosed as exemplary forms of implementing theclaimed invention.

1. A process for fabrication a metal-insulator-metal (MIM) device foractively addressing electro-optical effects comprising: creating one ormore surface relief levels in a dielectric layer over a conductivecarrier wherein the surface relief levels form trenches; depositing afirst metal in the trenches; anodizing the first metal to create anon-linear dielectric; depositing a second metal in the trenches tocreate an electrical contact with the non-linear dielectric; forming acontact with the second metal for an electro-optic effect; andtransferring the MIM device to a final substrate by adhesive transfer.2. The process of claim 1 wherein the creating is formed using anembossing process.
 3. The process of claim 1 wherein the trenches are ofvarying depths.
 4. The process of claim 1 wherein depositing the firstmetal is performed by vacuum deposition.
 5. The process of claim 1wherein the depositing the first metal is performed byelectro-deposition.
 6. The process of claim 1 wherein the depositing thesecond metal is performed by electro-deposition.
 7. The process of claim1 wherein the contact is a liquid crystal cell contact.
 8. The processof claim 1 wherein a single MIM is fabricated.
 9. The process of claim 1wherein a dual MIM is fabricated.
 10. The process of claim 1 hercomprising applying a transparent conductor.
 11. The process of claim 10wherein the transparent conductor is PEDOT.
 12. The process of claim 1wherein the first and second metals comprise alloys.
 13. Anelectro-optical display that comprises MIM devices fabricated from theprocess of claim
 1. 14-20. (canceled)
 21. A transparent substratecomprising the non-linear active device of claim
 13. 22. A liquidcrystal display comprising the non-linear active device of claim
 1. 23.The liquid crystal display of claim 22 wherein the electro-optic effectsare to liquid crystal cells.
 24. A process of creating a display devicecomprising: fabricating an array of active addressing devices comprisedof non-linear capacitive components formed by embossing of a reliefsurface creating a dielectric over conductive carrier; depositing metalsusing the conductive carrier as a conductive terminal; removing theconductive carrier by transferring the array of active addressingdevices onto a substrate; and forming contacts to electro-opticcomponents from the array of active addressing devices.
 25. The processof claim 24 wherein the active addressing components aremetal-insulator-metal (MIM) devices.
 26. The process of claim 25 whereinthe MIM devices are single MIM devices.
 27. The process of claim 25wherein the MIM devices are dual MIM devices.
 28. The process of claim24 wherein the electro-optic components are liquid crystal cells.